Suzhou Nanometer Institute of the Chinese Academy of Sciences: the second phase of the construction project of the nano-vacuum interconnection experimental station passed the acceptance

2023-02-20

On February 18, the Phase II construction project of the Nanovacuum Interconnection Experimental Station of the Suzhou Institute of Nanotechnology and Nanobionics, Chinese Academy of Sciences, successfully passed the general acceptance. It is reported that the nano-vacuum interconnection experimental station is a major scientific device in the field of materials that is being built by the Suzhou Institute of Nanotechnology and Nanobionics of the Chinese Academy of Sciences (hereinafter referred to as the "Suzhou Institute of Nanotechnology of the Chinese Academy of Sciences") in accordance with the world's first major national science and technology infrastructure standard and integrates the in-situ growth of materials, device processing, testing and analysis. The vacuum interconnection experimental station, facing the national strategic needs and major scientific frontier issues, has created a revolutionary technical route, organically interconnected the material growth, device technology, testing and analysis through ultra-high vacuum pipelines, and broken through the limitations of material characteristics, atomic-level precise control, surface/interface control and heterogeneous integration, and device in situ manufacturing that are difficult to break through by independent and decentralized equipment under the conventional ultra-clean environment, It provides support for the research of national strategic materials and cutting-edge materials with important organic and systematic large scientific devices. The nano-vacuum interconnection experimental station of the Suzhou Nanometer Institute of the Chinese Academy of Sciences is jointly invested and constructed by the Chinese Academy of Sciences, Jiangsu Province, Suzhou City and Suzhou Industrial Park. Since April 2014, through two phases of construction, nearly 40 large process equipment have been interconnected through 203 meters of ultra-high vacuum pipes. Five major module platforms have been built, including material preparation and technology, microscopic mechanism quasi-in-situ analysis, cross-scale performance test, atmosphere control and vacuum interconnection control and docking system. At the site, experts from the University of Science and Technology of China, the Institute of Chemistry of the Chinese Academy of Sciences, the Suzhou Institute of Medicine and Technology of the Chinese Academy of Sciences and other units formed an acceptance expert group to conduct on-site identification of the Phase II construction project, and unanimously agreed to pass the acceptance. From the trial operation in 2019 to the end of 2022, the experimental station has carried out 651 cooperation projects and served more than 220 users. It has gradually established a user scientific research service system with Suzhou Industrial Park as the center, based in Jiangsu Province, radiating the Yangtze River Delta, and extending both at home and abroad. Wang Qiangbin, deputy secretary of the Party Committee and deputy director of the Suzhou Nanometer Institute of the Chinese Academy of Sciences, said that as a national scientific research team, through the leading of cutting-edge science and technology and the supporting construction of major systematic platforms such as experimental stations, we have formed innovative leading advantages in electronic information, biomedicine and advanced materials. The construction of the third phase of the nano-vacuum interconnection experimental station will further strengthen the versatility and irreplaceable of the vacuum interconnection experimental station. Our future construction goal is to build the most advanced in-situ comprehensive research platform for nanomaterials and devices in the world, providing the full chain support from basic research original innovation, core technology breakthrough to industrialization. (Outlook New Era)

Edit:sishi    Responsible editor:xingyong

Source:https://epaper.gmw.cn/gmrb/html/2023-02/20/nw.D110000gmrb_20230220_3-08.htm

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