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Sci-Tech

The development of national first-class standard materials at the nanoscale angle has been successfully completed

2024-10-09   

On the 8th, the reporter learned from the State Administration for Market Regulation that the bureau has recently approved three national first level standard substances: two-dimensional chromium nano grid standard substance, two-dimensional silicon nano grid standard substance, and one-dimensional silicon nano grid standard substance. These substances can simultaneously meet the needs of the nano manufacturing industry for both angle and length calibration, providing accurate "standards" for nano manufacturing in the fields of new generation information technology, new materials, biological manufacturing, high-end equipment, etc. According to experts from Tongji University, the research and development unit of reference materials, the development of high-precision nanoscale reference materials is the key to creating a high-precision nanoscale measurement transmission chain and improving the quality and reliability of domestic nanomanufacturing products. The two-dimensional chromium nano grid standard material breakthrough adopts the stepwise deposition atomic lithography technology, which is difficult to prepare and can be directly traced back to the quantum physical constant of nature (chromium atom transition frequency). The absolute accuracy of the angle is in the order of 0.001 °, equivalent to dividing a cake into 360000 parts in a fan shape; The structural area of a two-dimensional chromium nanogrid is generally 300 μ m (micrometers) × 300 μ m (micrometers). Without scratches or damage, it can be used 2 μ m (micrometers) × 2 μ m (micrometers) each time, and the measurement area can be used more than 20000 times without repeated use. It can be applied to calibrate integrated circuit micro nano detection equipment such as wafer level atomic force microscopy and scanning electron microscopy, as well as to calibrate various parameters of ultra precision displacement sensors using grating interferometry. The successful development of nanoscale angle standard materials has achieved flat measurement in the field of nanoscale measurement. High precision measurement data can be directly transmitted to the enterprise measurement site through online calibration, avoiding the accumulation and amplification of errors caused by traditional step-by-step value transmission methods. This will provide strong support for the high-quality development of China's nanoscale manufacturing industry. It is reported that the State Administration for Market Regulation will continue to strengthen the research and application of standard materials in the field of nano measurement, further solve the problems of "inability to measure, incomplete measurement, and inaccurate measurement" in nano manufacturing, and provide support and guarantee for building a solid technological foundation for emerging and future industries. (New Society)

Edit:Fu Lili Responsible editor:Zhu Jiaqi

Source:Science and Technology Daily

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